Assessing and Characterizing Inter- and Intra-die Variation Using a Statistical Metrology Framework: A CMP Case Study
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چکیده
A statistical metrology methodology has been developed and used to study the contributions to spatial variation in ILD thickness remaining after chemical-mechanical polishing. New elements of statistical metrology are described, including a three-phase experimental approach and the use of a modified repeated measure analysis of variance technique.
منابع مشابه
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تاریخ انتشار 1996